Archive 2019

Silicon based 3D-nanomachining for wafer-scale fabrication of nano-devices

Tutorial

• Date: May 29, 2019
• Time: 04:00 PM (Local Time Germany)
• Speaker: Dr. Niels Tas
• University of Twente
• Location: Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, 06120 Halle (Saale)
• Host: IMPRS-STNS