Scientific module: Top-down nanofabrication
Scientific Module
- Beginn: 20.05.2025 14:30
- Ende: 21.05.2025 18:00
- Vortragende(r): Dr. Niels Tas
- Ort: Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, 06120 Halle (Saale)
- Raum: Lecture Hall Building B
- Gastgeber: IMPRS-STNS
- Kontakt: imprs@mpi-halle.mpg.de
Preparation
Each participating PhD student or postdoc prepares some slides to introduce typical structures and devices that are fabricated in his/her project.
Preliminary schedule
May 20, 2025
14:30 - 14:45 Walk-in, coffee + introduction
14:45 - 15:15 Short lecture: Self-aligned (3D) silicon based nano-fabrication (Niels Tas + Erwin Berenschot)
15:15 - 16:30 Short project presentations
16:30 - 17:00 Discussion, choose topics, form groups (2-3) to work together the next day
May 21, 2025
09:00 - 09:30 Coffee + Introducing the day
09:30 - 10:00 Short lecture: silicon wet/dry etching, oxidation, silicon nitride and a-Si LPCVD (Niels Tas)
10:05 - 10:35 Short lecture: ALD, sputtering, electron beam lithography (Jiho Yoon, Andrea Migliorini, Haojie Zhang)
10:35 - 10:45 Coffee break
10:45 - 11:45 First phase group design (conceptual design: working principle + fabrication approach)
11:45 - 12:45 Lunch + discussing the concepts and approaches
13:00 - 15:15 Second phase group design (Detailed fabrication) incl. discussions with instructors
15:30 - 16:30 Coffee + prepare some slides
16:30 - 17:30 Group presentations + discussions
17:30 - 18:00 Conclusions + feedback